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Fundamentals of microfabrication and nanotechnology

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Sonraí Bibleagrafaíochta
Príomhúdar:	Madou, Marc J
Formáid:	Printed Book
Teanga:	English
Foilsithe:	Boca Raton CRC Press 2012
Eagrán:	3rd ed.
Ábhair:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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