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Fundamentals of microfabrication and nanotechnology

Détails bibliographiques
Auteur principal:	Madou, Marc J
Format:	Printed Book
Langue:	English
Publié:	Boca Raton CRC Press 2012
Édition:	3rd ed.
Sujets:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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