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Fundamentals of microfabrication and nanotechnology
| Egile nagusia: | Madou, Marc J |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
Boca Raton
CRC Press
2012
|
| Edizioa: | 3rd ed. |
| Gaiak: |
Antzeko izenburuak
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