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Fundamentals of microfabrication and nanotechnology

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Manylion Llyfryddiaeth
Prif Awdur:	Madou, Marc J
Fformat:	Printed Book
Iaith:	English
Cyhoeddwyd:	Boca Raton CRC Press 2012
Rhifyn:	3rd ed.
Pynciau:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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