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Fundamentals of microfabrication and nanotechnology

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Dades bibliogràfiques
Autor principal:	Madou, Marc J
Format:	Printed Book
Idioma:	English
Publicat:	Boca Raton CRC Press 2012
Edició:	3rd ed.
Matèries:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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