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Fundamentals of microfabrication and nanotechnology

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Bibliographic Details
Main Author:	Madou, Marc J
Format:	Printed Book
Language:	English
Published:	Boca Raton CRC Press 2012
Edition:	3rd ed.
Subjects:	Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics

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