Fundamentals of microfabrication and nanotechnology

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Bibliographic Details
Main Author: Madou, Marc J
Format: Printed Book
Language:English
Published: Boca Raton CRC Press 2012
Edition:3rd ed.
Subjects:
Microelectromechanical systems
Nano electromechanical systems
Microfluidics
Solidstate physics
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245 |a Fundamentals of microfabrication and nanotechnology 
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260 |b CRC Press  |c 2012  |a Boca Raton 
300 |a 3v. 
500 |a V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS 
653 |a Microelectromechanical systems 
653 |a Nano electromechanical systems 
653 |a Microfluidics 
653 |a Solidstate physics 
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