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Fundamentals of microfabrication and nanotechnology
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| 格式: | Printed Book |
| 語言: | English |
| 出版: |
Boca Raton
CRC Press
2012
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| 版: | 3rd ed. |
| 主題: |
| Item Description: | V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS |
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| 實物描述: | 3v. |
| ISBN: | 978142005545 |