Laddar...
Fundamentals of microfabrication and nanotechnology
| Huvudupphovsman: | |
|---|---|
| Materialtyp: | Printed Book |
| Språk: | English |
| Publicerad: |
Boca Raton
CRC Press
2012
|
| Upplaga: | 3rd ed. |
| Ämnen: |
| Beskrivning: | V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS |
|---|---|
| Fysisk beskrivning: | 3v. |
| ISBN: | 978142005545 |