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Fundamentals of microfabrication and nanotechnology
| Hoofdauteur: | |
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| Formaat: | Printed Book |
| Taal: | English |
| Gepubliceerd in: |
Boca Raton
CRC Press
2012
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| Editie: | 3rd ed. |
| Onderwerpen: |
| Beschrijving item: | V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS |
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| Fysieke beschrijving: | 3v. |
| ISBN: | 978142005545 |