Lataa...
Fundamentals of microfabrication and nanotechnology
| Päätekijä: | |
|---|---|
| Aineistotyyppi: | Printed Book |
| Kieli: | English |
| Julkaistu: |
Boca Raton
CRC Press
2012
|
| Painos: | 3rd ed. |
| Aiheet: |
| Huomautukset: | V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS |
|---|---|
| Ulkoasu: | 3v. |
| ISBN: | 978142005545 |