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Fundamentals of microfabrication and nanotechnology
| Autor principal: | |
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| Formato: | Printed Book |
| Lenguaje: | English |
| Publicado: |
Boca Raton
CRC Press
2012
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| Edición: | 3rd ed. |
| Materias: |
| Notas: | V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS |
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| Descripción Física: | 3v. |
| ISBN: | 978142005545 |