Madou, M. J. (2012). Fundamentals of microfabrication and nanotechnology (3rd ed.). CRC Press.
Chicago Edition CitationMadou, Marc J. Fundamentals of Microfabrication and Nanotechnology. 3rd ed. Boca Raton: CRC Press, 2012.
Deismireacht MLAMadou, Marc J. Fundamentals of Microfabrication and Nanotechnology. 3rd ed. CRC Press, 2012.
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