Lithography main techniques

Bibliographic Details
Main Author: Landis, Stefan., ed (ed.by)
Format: Printed Book
Language:English
Published: U.K. ISTE Ltd and John wiley 2011
Subjects:
Lithography
Electron beam lithography
Microlithography

UL

Holdings details from UL
Call Number: 621.3.049.77 LAN
Copy Live Status Unavailable

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