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120306t xxu||||| |||| 00| 0 eng d |
| 080 |
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|a 621.3.049.77
|b LAN
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| 100 |
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|a Landis, Stefan., ed.
|e ed.by
|9 19520
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| 245 |
|
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|a Lithography
|b main techniques
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| 300 |
|
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|a xxv, 377p.
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| 653 |
|
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|a Lithography
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| 653 |
|
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|a Electron beam lithography
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| 653 |
|
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|a Microlithography
|
| 942 |
|
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|c BK
|6 _
|
| 260 |
|
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|a U.K.
|b ISTE Ltd and John wiley
|c 2011
|9 19521
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| 020 |
|
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|a 9781848212022
|
| 999 |
|
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|c 62092
|d 62092
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|1 0
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|a UL
|b UL
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|d 2011-11-14
|e 121
|g 0.00
|l 5
|o 621.3.049.77 LAN
|p 00066203
|r 2014-07-14
|s 2014-05-06
|v 0.00
|w 2011-11-14
|y BK
|