Lithography main techniques

Bibliografski detalji
Glavni autor: Landis, Stefan., ed (ed.by)
Format: Printed Book
Jezik:English
Izdano: U.K. ISTE Ltd and John wiley 2011
Teme:
Lithography
Electron beam lithography
Microlithography
Opis
Opis:xxv, 377p.
ISBN:9781848212022

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