Stuart , R. V. (1983). Vacuum Technology , Thin Films , and Sputtering , an Introduction. Academic Press.
Chicago ZitierstilStuart , R. V. Vacuum Technology , Thin Films , and Sputtering , an Introduction. New York: Academic Press, 1983.
MLA ZitierstilStuart , R. V. Vacuum Technology , Thin Films , and Sputtering , an Introduction. Academic Press, 1983.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.