Stuart , R. V. (1983). Vacuum Technology , Thin Films , and Sputtering , an Introduction. Academic Press.
Chicago Edition CitationStuart , R. V. Vacuum Technology , Thin Films , and Sputtering , an Introduction. New York: Academic Press, 1983.
Deismireacht MLAStuart , R. V. Vacuum Technology , Thin Films , and Sputtering , an Introduction. Academic Press, 1983.
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