Stuart , R. V. (1983). Vacuum Technology , Thin Films , and Sputtering , an Introduction. Academic Press.
Chicago Edition CitationStuart , R. V. Vacuum Technology , Thin Films , and Sputtering , an Introduction. New York: Academic Press, 1983.
MLA Edition CitationStuart , R. V. Vacuum Technology , Thin Films , and Sputtering , an Introduction. Academic Press, 1983.
Warning: These citations may not always be 100% accurate.