|
|
|
|
| LEADER |
00744nam a2200253 a 4500 |
| 001 |
adlib96000001 |
| 003 |
ViArRB |
| 005 |
20151026132901.0 |
| 008 |
960221s1955 dcuabcdjdbkoqu001 0deng d |
| 020 |
|
|
|
| 022 |
|
|
|
| 040 |
|
|
|a Adlib
|
| 082 |
|
|
|a 621.375.826:539.23
|
| 245 |
|
|
|a Laser microfabrication: thin film process and lithography
|
| 250 |
|
|
|
| 260 |
|
|
|a Boston
|b Academic Press
|c 1989
|
| 300 |
|
|
|a xii, 587p.
|
| 500 |
|
|
|a
|
| 100 |
|
|
|a Laser
|
| 700 |
|
|
|
| 942 |
|
|
|c BK
|6 _
|
| 653 |
|
|
|a laser fabrication
|a Thin film process
|a lithography
|a Ehrlich, Daniel J
|
| 999 |
|
|
|c 58403
|d 58403
|
| 952 |
|
|
|0 0
|1 0
|4 0
|6 62137582653923_EHR
|7 0
|9 71094
|a UL
|b UL
|d 2010-11-24
|l 2
|o 621.375.826:539.23 EHR
|p 00036946
|r 2015-02-10
|s 2014-10-13
|w 2010-11-24
|y BK
|