Laser. (1989). Laser microfabrication: Thin film process and lithography. Academic Press.
Chicago Edition CitationLaser. Laser Microfabrication: Thin Film Process and Lithography. Boston: Academic Press, 1989.
Cita MLALaser. Laser Microfabrication: Thin Film Process and Lithography. Academic Press, 1989.
Atenció: Aquestes cites poden no estar 100% correctes.