Laser. (1989). Laser microfabrication: Thin film process and lithography. Academic Press.
Chicago Edition CitationLaser. Laser Microfabrication: Thin Film Process and Lithography. Boston: Academic Press, 1989.
MLA Edition CitationLaser. Laser Microfabrication: Thin Film Process and Lithography. Academic Press, 1989.
Warning: These citations may not always be 100% accurate.