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Photonic MEMS devices design,fabrication and control

Xehetasun bibliografikoak
Egile nagusia:	Liu, Ai-Qun...[et.al]
Formatua:	Printed Book
Hizkuntza:	English
Argitaratua:	Boca Raton CRC Press 2009
Gaiak:	Microelectromechanical systems

Antzeko izenburuak

Photonic MEMS devices : design, fabrication and control /
nork: Liu, Ai-Qun
Argitaratua: (2009)

Reliability of MEMS:testing of materials and devices
nork: Tabata,Osamu
Argitaratua: (2008)

Reliability of MEMS /
Argitaratua: (2008)

Electromechanics and MEMS
nork: Jones, Thomas B
Argitaratua: (2013)

Advances in multiphysics simulation and experimental testing of Mems
nork: Frangi, Attilio
Argitaratua: (2008)

Advanced MEMS packaging/
nork: Lau, John H.
Argitaratua: (2010)

Advanced RF MEMS /
nork: Lucyszyn, S.
Argitaratua: (2010)

Modeling MEMS and NEMS /
nork: Pelesko,John A.
Argitaratua: (2003)

LIGA and its applications
nork: Saile,Volker ...[et.al]
Argitaratua: (2009)

MEMS and MOEMS technology and applications /
Argitaratua: (2009)

MEMS and microsystems : design, manufacture, and nanoscale engineering /
nork: Hsu, Tai-Ran
Argitaratua: (2008)

Scaling issues and design of MEMS
nork: Baglio, Salvatore
Argitaratua: (2007)

Microsensor, MEMS and smart devices
nork: Gardner, Julian W.
Argitaratua: (2007)

Micromachines as tools for nanotechnology
nork: Fujita, H
Argitaratua: (2004)

Introductory MEMS : fabrication and applications /
nork: Adams, Thomas M.
Argitaratua: (2010)

Principles and applications of NanoMEMS physics
nork: Dogra, H. R.
Argitaratua: (2008)

MEMS/MOEMS packaging : concepts, designs, materials, and processes /
nork: Gilleo, Ken
Argitaratua: (2005)

Modeling and control for micro/nano devices and systems /
Argitaratua: (2014)

Integrated microsystems : electronics, photonics, and biotechnology /
Argitaratua: (2012)

Microsystems and nanotechnology /
Argitaratua: (2012)

Inertial MEMS: principles and practice
nork: Kempe, Volker; Author
Argitaratua: (2011)

MEMS
nork: Mahalik, Nitaigour Premchand
Argitaratua: (2007)

Inertial MEMS principles and practice
nork: Kempe, Volker
Argitaratua: (2011)

MEMS and microsystems: design and manufacture
nork: Hsu, Tai-Ran
Argitaratua: (2005)

MEMS: introduction and fundamentals
nork: Gad-el-Hak, Muhamed [ed.]
Argitaratua: (2006)

Modeling MEMS and NEMS
nork: Pelesko, John A.
Argitaratua: (2007)

MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications /
nork: Jha, A. R.
Argitaratua: (2008)

Principles and applications of NanoMEMS physics /
nork: Santos, Hector J. de los
Argitaratua: (2005)

Principles and applications of NanoMEMS physics /
nork: Santos, Héctor J. de los
Argitaratua: (2005)

VLSI micro- and nanophotonics : science, technology, and applications /
Argitaratua: (2010)

MEMS and nanotechnology for gas sensors /
nork: Roy, Sunipa, et al.
Argitaratua: (2016)

BioNanoFluidic MEMS /
Argitaratua: (2008)

Micro electro mechanical system design /
nork: Allen, James J.
Argitaratua: (2005)

Micro electro mechanical system design /
nork: Allen, James J.
Argitaratua: (2005)

Photonic Devices
nork: Liu, Jia-ming
Argitaratua: (2005)

Photonic Devices
nork: Liu, Jia-ming
Argitaratua: (2010)

Photonic devices /
nork: Liu, Jia-Ming
Argitaratua: (2005)

CMOS-MEMS
nork: Brand, Oliver
Argitaratua: (2013)

Photonic microsystems : micro and nanotechnology applied to optical devices and systems /
nork: Solgaard, Olav

Microrobotics methods and applications
nork: Bellourd, Yves
Argitaratua: (2010)