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100909t xxu||||| |||| 00| 0 eng d |
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|a 621.382
|b LIU
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| 100 |
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|a Liu, Ai-Qun...[et.al]
|9 13043
|
| 245 |
|
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|a Photonic MEMS devices
|b design,fabrication and control
|c Ai-Qun Liu...[et.al]
|
| 300 |
|
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|a 483p.
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| 653 |
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|a Microelectromechanical systems
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| 942 |
|
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|c BK
|6 _
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| 260 |
|
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|a Boca Raton
|b CRC Press
|c 2009
|9 212
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| 020 |
|
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|a 9781420045680
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| 999 |
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|c 57128
|d 57128
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|b UL
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|d 2010-09-09
|l 2
|m 3
|o 621.382 LIU
|p 00063337
|r 2013-05-03
|s 2013-01-16
|w 2010-09-09
|y BK
|