Baglio, S., & Castorina, S. S. (2007). Scaling issues and design of MEMS. John Wiley and Sons.
Chicago Edition CitationBaglio, Salvatore, and Saslvatore Savalli Castorina. Scaling Issues and Design of MEMS. Chichester: John Wiley and Sons, 2007.
MLA Edition CitationBaglio, Salvatore, and Saslvatore Savalli Castorina. Scaling Issues and Design of MEMS. John Wiley and Sons, 2007.
Warning: These citations may not always be 100% accurate.