Plasma-Aided nanofabrication:from plasma sources to nanoassembly

Liknande verk

• Plasma nanoscience: basic concepts and applications of deterministic nanofabrication
  av: Ostrikov, Kostya; Author
  Publicerad: (2008)
• Cold plasma in materials fabrication: from fundamentals to applications /
  av: Grill, Alfred
  Publicerad: (1994)
• Plasma electronics applications in microelectronic device fabrication
  av: Makabe, Toshiaki
  Publicerad: (2015)
• High power RF heating and nonthermal distributions in tokamak plasmas
  av: Peeters, Arthur Godfried
  Publicerad: (1994)
• Plasma nanoscience
  av: Ostrikov, Kostya
  Publicerad: (2008)