Plasma-Aided nanofabrication:from plasma sources to nanoassembly

Míreanna Comhchosúla

• Plasma nanoscience: basic concepts and applications of deterministic nanofabrication
  le: Ostrikov, Kostya; Author
  Foilsithe: (2008)
• Cold plasma in materials fabrication: from fundamentals to applications /
  le: Grill, Alfred
  Foilsithe: (1994)
• Plasma electronics applications in microelectronic device fabrication
  le: Makabe, Toshiaki
  Foilsithe: (2015)
• High power RF heating and nonthermal distributions in tokamak plasmas
  le: Peeters, Arthur Godfried
  Foilsithe: (1994)
• Plasma nanoscience
  le: Ostrikov, Kostya
  Foilsithe: (2008)