Plasma-Aided nanofabrication:from plasma sources to nanoassembly

Antzeko izenburuak

• Plasma nanoscience: basic concepts and applications of deterministic nanofabrication
  nork: Ostrikov, Kostya; Author
  Argitaratua: (2008)
• Cold plasma in materials fabrication: from fundamentals to applications /
  nork: Grill, Alfred
  Argitaratua: (1994)
• Plasma electronics applications in microelectronic device fabrication
  nork: Makabe, Toshiaki
  Argitaratua: (2015)
• High power RF heating and nonthermal distributions in tokamak plasmas
  nork: Peeters, Arthur Godfried
  Argitaratua: (1994)
• Plasma nanoscience
  nork: Ostrikov, Kostya
  Argitaratua: (2008)