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Plasma-Aided nanofabrication:from plasma sources to nanoassembly

Bibliographic Details
Main Author:	Ostrikov, Kostya(Ken)
Other Authors:	Xu, Shuyan
Format:	Printed Book
Language:	English
Published:	Weinhein Wiley - VCH 2007.
Subjects:	Nanostructured materials > Plasma engineering > Low temparature plasmas > Manufactureing processes

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