Plasma-Aided nanofabrication:from plasma sources to nanoassembly

Eitemau Tebyg

• Plasma nanoscience: basic concepts and applications of deterministic nanofabrication
  gan: Ostrikov, Kostya; Author
  Cyhoeddwyd: (2008)
• Cold plasma in materials fabrication: from fundamentals to applications /
  gan: Grill, Alfred
  Cyhoeddwyd: (1994)
• Plasma electronics applications in microelectronic device fabrication
  gan: Makabe, Toshiaki
  Cyhoeddwyd: (2015)
• High power RF heating and nonthermal distributions in tokamak plasmas
  gan: Peeters, Arthur Godfried
  Cyhoeddwyd: (1994)
• Plasma nanoscience
  gan: Ostrikov, Kostya
  Cyhoeddwyd: (2008)