Plasma-Aided nanofabrication:from plasma sources to nanoassembly

Bibliographic Details
Main Author: Ostrikov, Kostya(Ken)
Other Authors: Xu, Shuyan
Format: Printed Book
Language:English
Published: Weinhein Wiley - VCH 2007.
Subjects:
Nanostructured materials > Plasma engineering > Low temparature plasmas > Manufactureing processes
Description
Item Description:
Physical Description:xiii,300p.
ISBN:9783527406333

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