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Handbook of silicon wafer cleaning technology

Dades bibliogràfiques
Autor principal:	Reinhardt, Karen. A. (ed.by)
Altres autors:	Kern, Werner
Format:	Printed Book
Idioma:	English
Publicat:	Norwich William Andrew 2008
Edició:	2nd
Matèries:	Silcon-on-insulator technology > Silicon wafer > Dry cleaning > Wet chemical processes > Plasma stripping

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