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Handbook of silicon wafer cleaning technology

Xehetasun bibliografikoak
Egile nagusia:	Reinhardt, Karen. A. (ed.by)
Beste egile batzuk:	Kern, Werner
Formatua:	Printed Book
Hizkuntza:	English
Argitaratua:	Norwich William Andrew 2008
Edizioa:	2nd
Gaiak:	Silcon-on-insulator technology > Silicon wafer > Dry cleaning > Wet chemical processes > Plasma stripping

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Silicon and its compounds /
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