Handbook of silicon wafer cleaning technology

Bibliografski detalji
Glavni autor: Reinhardt, Karen. A. (ed.by)
Daljnji autori: Kern, Werner
Format: Printed Book
Jezik:English
Izdano: Norwich William Andrew 2008
Izdanje:2nd
Teme:
Silcon-on-insulator technology > Silicon wafer > Dry cleaning > Wet chemical processes > Plasma stripping
Opis
Opis djela:
Opis:xxvi, 718p
ISBN:9780815515548

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