Reinhardt, K. A., & Kern, W. (2008). Handbook of silicon wafer cleaning technology (2nd.). William Andrew.
シカゴスタイル引用形Reinhardt, Karen. A., , Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. Norwich: William Andrew, 2008.
MLA引用形式Reinhardt, Karen. A., , Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. William Andrew, 2008.
警告: この引用は必ずしも正確ではありません.