Deismireacht APA

Reinhardt, K. A., & Kern, W. (2008). Handbook of silicon wafer cleaning technology (2nd.). William Andrew.

Chicago Edition Citation

Reinhardt, Karen. A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. Norwich: William Andrew, 2008.

Deismireacht MLA

Reinhardt, Karen. A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. William Andrew, 2008.

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