Reinhardt, K. A., & Kern, W. (2008). Handbook of silicon wafer cleaning technology (2nd.). William Andrew.
Dyfyniad Arddull ChicagoReinhardt, Karen. A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. Norwich: William Andrew, 2008.
Dyfyniad MLAReinhardt, Karen. A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. William Andrew, 2008.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.