Reinhardt, K. A., & Kern, W. (2008). Handbook of silicon wafer cleaning technology (2nd.). William Andrew.
Stile di citazione ChicagoReinhardt, Karen. A., e Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. Norwich: William Andrew, 2008.
Citazione MLAReinhardt, Karen. A., e Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. William Andrew, 2008.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.