Reinhardt, K. A., & Kern, W. (2008). Handbook of silicon wafer cleaning technology (2nd.). William Andrew.
Chicago Edition CitationReinhardt, Karen. A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. Norwich: William Andrew, 2008.
MLA Edition CitationReinhardt, Karen. A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd. William Andrew, 2008.
Warning: These citations may not always be 100% accurate.