Advances in multiphysics simulation and experimental testing of Mems

類似資料

• Electromechanics and MEMS
  著者:: Jones, Thomas B
  出版事項: (2013)
• Scaling issues and design of MEMS
  著者:: Baglio, Salvatore
  出版事項: (2007)
• Reliability of MEMS /
  出版事項: (2008)
• Photonic MEMS devices design,fabrication and control
  著者:: Liu, Ai-Qun...[et.al]
  出版事項: (2009)
• Inertial MEMS principles and practice
  著者:: Kempe, Volker
  出版事項: (2011)