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MEMS

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书目详细资料
主要作者:	Mahalik, Nitaigour Premchand
格式:	Printed Book
语言:	English
出版:	New Delhi Tata McGraw-Hill 2007
主题:	Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Micro sensors

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