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Microsensor, MEMS and smart devices

Bibliografiska uppgifter
Huvudupphovsman:	Gardner, Julian W.
Materialtyp:	Printed Book
Språk:	English
Publicerad:	Chichester John Wiley & Sons 2007
Ämnen:	Microelectronics > Electronics > Semiconductors > MEMS > Microelectromechanical systems > Microsensors > Micromachines

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