Microsensor, MEMS and smart devices

Podobne zapisy

• Micro and smart devices and systems
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• MEMS and microsystems: design and manufacture
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• MEMS
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• Integrated chemical microsensor systems in CMOS technology
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• MEMS: introduction and fundamentals
  od: Gad-el-Hak, Muhamed [ed.]
  Wydane: (2006)