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Microsensor, MEMS and smart devices

书目详细资料
主要作者:	Gardner, Julian W.
格式:	Printed Book
语言:	English
出版:	Chichester John Wiley & Sons 2007
主题:	Microelectronics > Electronics > Semiconductors > MEMS > Microelectromechanical systems > Microsensors > Micromachines

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