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Optical metrology
| Main Author: | |
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| Format: | Printed Book |
| Language: | English |
| Published: |
Chichester
John Wiley & Sons
2002
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| Edition: | 3rd ed. |
| Subjects: |
| Item Description: | |
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| Physical Description: | x, 360p. |
| ISBN: | 0470843004 |