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|a Adlib
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|a 681.382
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| 245 |
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|a Modeling MEMS and NEMS
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| 250 |
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| 260 |
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|a Boca Raton
|b Chapman & Hall /CRC
|c 2007
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| 300 |
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|a xxiii, 357p
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|a
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| 100 |
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|a Pelesko, John A.
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| 700 |
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|a Bernstein, David H.
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| 942 |
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|c BK
|6 _
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| 653 |
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|a MEMS- Mathematical models
|a NEMS- Mathematical models
|a Microelectromechanical systems
|a Nanoelectromechanical systems
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