Hsu, T. (2005). MEMS and microsystems: Design and manufacture. Tata McGraw- Hill.
Chicago Edition CitationHsu, Tai-Ran. MEMS and Microsystems: Design and Manufacture. New Delhi: Tata McGraw- Hill, 2005.
MLA Edition CitationHsu, Tai-Ran. MEMS and Microsystems: Design and Manufacture. Tata McGraw- Hill, 2005.
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