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Dyfyniad Arddull ChicagoHsu, Tai-Ran. MEMS and Microsystems: Design and Manufacture. New Delhi: Tata McGraw- Hill, 2005.
Dyfyniad MLAHsu, Tai-Ran. MEMS and Microsystems: Design and Manufacture. Tata McGraw- Hill, 2005.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.