Hsu, T. (2005). MEMS and microsystems: Design and manufacture. Tata McGraw- Hill.
Chicago Edition CitationHsu, Tai-Ran. MEMS and Microsystems: Design and Manufacture. New Delhi: Tata McGraw- Hill, 2005.
MLA Edition CitationHsu, Tai-Ran. MEMS and Microsystems: Design and Manufacture. Tata McGraw- Hill, 2005.
Warning: These citations may not always be 100% accurate.