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Nano and micro electomechanical systems: fundamentals of nano and microengineering

书目详细资料
主要作者:	Lyshevski, Sergey Edward
格式:	Printed Book
语言:	English
出版:	Boca Raton CRC Press 2005
版:	2nd ed.
主题:	Microelectronics > Electronics > Semiconductors > Nanotechnology > Microelectromechanical systems > MEMS > NEMS > Nanoelectromechanical systems > Biomimetics

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