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Nano and micro electomechanical systems: fundamentals of nano and microengineering

Bibliografiska uppgifter
Huvudupphovsman:	Lyshevski, Sergey Edward
Materialtyp:	Printed Book
Språk:	English
Publicerad:	Boca Raton CRC Press 2005
Upplaga:	2nd ed.
Ämnen:	Microelectronics > Electronics > Semiconductors > Nanotechnology > Microelectromechanical systems > MEMS > NEMS > Nanoelectromechanical systems > Biomimetics

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