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Nano and micro electomechanical systems: fundamentals of nano and microengineering

Detalhes bibliográficos
Autor principal:	Lyshevski, Sergey Edward
Formato:	Printed Book
Idioma:	English
Publicado em:	Boca Raton CRC Press 2005
Edição:	2nd ed.
Assuntos:	Microelectronics > Electronics > Semiconductors > Nanotechnology > Microelectromechanical systems > MEMS > NEMS > Nanoelectromechanical systems > Biomimetics

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